MEMS motion sensor:
Dual Axis Pitch and Yaw ±300°/s Analog Gyroscope LPY530AL
The LPY530AL is a low-power two-axis micromachined gyroscope able to measure angular rate along pitch and yaw axes. It provides excellent temperature stability and high resolution over extended operating temperature range (-40°C to +85°C).
The LPY530AL has a full scale of ±300 °/s and is capable of detecting rates with a -3 dB bandwidth up to 140 Hz. The gyroscope is the combination of one actuator and one accelerometer integrated in a single micromachined structure. It includes a sensing element composed by single driving mass, kept in continuos oscillating movement and able to react when an angular rate is applied based on the Coriolis principle.
A CMOS IC provides the measured angular rate to the external world through an analog output voltage, allowing high level of integration and production trimming to better match sensing element characteristics.